System and method for monitoring and/or controlling a flow of a media

ABSTRACT

Some embodiments of the invention relate to a system and method for enhanced monitoring and/or controlling a flow of a media. For example, the flow of the media may be controlled and/or monitored over an enhanced range of flow rates; control over the flow of the media may be highly linear; the flow of an aggressive media may be controlled and/or monitored; or, other advantages may be provided.

RELATED APPLICATIONS

This application claims priority from the U.S. Provisional Patent Application No. 60/614,554, entitled “SYSTEM AND METHOD FOR MONITORING AND/OR CONTROLLING A FLOW OF A MEDIA,” filed Oct. 1, 2004, and herein incorporated by reference.

FIELD OF THE INVENTION

The invention relates generally to a system and method for monitoring and/or controlling a flow of a media.

BACKGROUND OF THE INVENTION

Various systems for monitoring and/or controlling a flow of a media, such as gases, fluids, or other media, are known and include various limitations and drawbacks.

SUMMARY

The invention may relate generally to a system and method for enhanced monitoring and/or controlling a flow of a media. For example, the flow of the media may be controlled and/or monitored over an enhanced range of flow rates; control over the flow of the media may be highly linear; the flow of an aggressive media may be controlled and/or monitored; or, other advantages may be provided.

One aspect of the invention may relate to a sensor for detecting a differential pressure that may be immune (or substantially immune) to aggressive media. The sensor may generate pressure data in response to a detected pressure. The pressure data may be generated by the sensor in the form of an output signal. For example, the sensor may detect a pressure of a fluid media, or other pressures. In some embodiments, the sensor may include a differential pressure transducer, or other sensors for detecting a differential pressure.

In some embodiments of the invention, the sensor may be made immune to aggressive media according to a method of protecting a sensor against aggressive media. The method may include disassembling an unprotected sensor into one or more sensor components.

One or more of the sensor components may include a semi-conductive surface. The semi-conductive surface may include an edge. According to the method, one or more of the semi-conductive surfaces of the sensor components may be masked. A novel jigging assembly may be used to mask the appropriate semi-conductive surfaces.

Once the appropriate semi-conductive surfaces have been masked, a protective coating may be applied to one or more of the sensor components. In some instances, the protective coating may include an amorphous diamond-like coating, a passivation layer, a polymer coating, a sapphire coating, or other protective coatings. For example, applying the protective coating may include applying the protective coating in a plasma enhanced chemical vapor deposition system, applying the protective coating at low temperatures, or otherwise applying the protective coating. A thickness of the protective coating may be controlled at the angstrom level. The protective coating may provide a pinhole free coating, or other augmentations may be provided.

According to various embodiments of the invention, the coated sensor components may be reassembled to form a protected sensor. The protective coating applied to the coated sensor components of the protected sensor may form a protective barrier against aggressive media and may render the protected sensor immune to aggressive media.

In some embodiments, the protective coating may be applied with a depth such that one or more characteristics of an output signal generated by the protected sensor in response to a detected pressure may be identical (or substantially identical) to an output signal generated by the unprotected sensor (i.e. the protected sensor prior to the application of the protective coating) in response to the same pressure. This may require the protective coating to be applied with a depth such that the coated sensor components may be assembled into the protected sensor with little or no stress due to an increase in size caused by the depth of the protective coating. For example, the protective coating may be provided with a depth of 5-10 Angstroms, or other depths.

Another aspect of the invention may relate to a valve including a variable valve opening that may be immune (or substantially immune) to aggressive media. The valve may vary a size of the variable valve opening over a valve opening range in response to control data. The control data may be in the form of a control signal. In some embodiments, the valve may include a proportional valve, or other valves including a variable valve opening.

In some embodiments of the invention, the valve may be made immune to aggressive media according to a method of protecting a valve against aggressive media. The method may include disassembling an unprotected valve into one or more valve components.

Once the valve has been disassembled into the valve components, a protective coating may be applied to one or more of the valve components. In some instances, the protective coating may include an amorphous diamond-like coating, a passivation layer, a polymer coating, a sapphire coating, or other protective coatings. For example, applying the protective coating may include applying the protective coating in a plasma enhanced chemical vapor deposition system, applying the protective coating at low temperatures, or otherwise applying the protective coating. A thickness of the protective coating may be controlled at the angstrom level. The protective coating may provide a pinhole free coating, or other augmentations may be provided.

According to various embodiments of the invention, the coated valve components may be reassembled to form a protected valve. The protective coating applied to the coated valve components of the protected valve may form a protective barrier against aggressive media and may render the protected valve immune to aggressive media.

In some embodiments, the protective coating may be applied with a depth such that one or more characteristics of a response of the protected valve to a control signal in configuring the variable valve opening may be identical (or substantially identical) to a response of the unprotected valve (i.e. the protected sensor prior to the application of the protective coating) to the same control signal in configuring the variable valve opening. This may require the protective coating to be applied with a depth such that the coated valve components may be assembled into the protected sensor with little or no stress due to an increase in size caused by the depth of the protective coating. For example, the protective coating may be provided with a depth of 5-10 Angstroms, or other depths.

Another aspect of the invention may relate to a system for monitoring and/or controlling a flow of a media. The system may include a flow unit and a processor. The flow unit may include a flow body, a sensor, and one or more removable orifice members. The media may flow through the flow unit via the flow body. A user may select the orifice members from a plurality of orifice members and may removably install the selected orifice members in the flow unit according to a desired feature. For example, orifice members may be selected and installed to provide a flow rate, a range of flow rates, or other features. The sensor may measure, acquire, or otherwise sense pressure data related to a pressure of the media within the flow unit. One or more openings associated with each orifice member may be configured to control a flow rate of the media flowing through the flow unit. The processor may receive the pressure data provided by the sensor. Based at least in part on the pressure data, the processor may determine flow data related to the flow of the media through the flow unit. The processor may generate control data related to controlling one or more aspects of the flow unit to control the flow rate of the media. For example, an aspect of the flow unit may include a size of one or more openings of one or more orifice members, or other aspects of the flow unit.

In some embodiments of the invention, the flow body may include a media entrance that may enable the media to enter the flow unit. A media channel may be formed in the flow body that may enable the media to flow through the flow unit. The flow body may include a media exit. The media may exit the flow unit via the media exit.

According to various embodiments of the invention, the sensor may measure, acquire, or otherwise sense pressure data related to a pressure of the media within the flow unit. The sensor may include a differential pressure transducer to measure, acquire, or otherwise sense the pressure data. The sensor may be immune to aggressive media. For example, the sensor may include a protected sensor made immune to aggressive according to the method of protecting a sensor against aggressive media, or other sensors that may be immune to aggressive media.

In some embodiments of the invention, a variable valve opening and one or more orifice openings may be formed within each orifice member. A size of the variable valve opening may vary over a valve opening range. The sizes of the orifice openings and the variable valve opening of the orifice member may control the flow of the media through the orifice member. Enabling a user to control the variable valve opening may enable the flow of the media through the orifice member to be controlled by the user.

The orifice member may include a valve. The valve may provide the variable valve opening. The valve may vary the size of the variable valve opening over the valve opening range in response to control data. The valve may be immune to aggressive media. For example, the valve may include a protected valve made immune to aggressive according to the method of protecting a valve against aggressive media, or other valves that may be immune to aggressive media.

The removability of the orifice members may enhance control of the flow of the media. For example, a plurality of combinations of various orifice members with various combinations of sizes of orifice openings and ranges of valve opening ranges may be installed into the flow unit to guide the media through the flow unit over an enhanced range of flow rates. In some embodiments of the invention, these orifice members may “snap-fit” with one another, the flow body, and other system components.

In some embodiments of the invention, a processor associated with the system may include one or more modules, such as, a pressure data module, an orifice module, a control output module, an interface module, or other modules. The modules may be implemented in hardware, software, firmware, or a combination of hardware, software, and/or firmware. As would be apparent, various embodiments of the invention may include and/or use some, all, or none of these modules. Further, additional modules may be included in the system for providing other functions.

The pressure data module may receive the pressure data generated by the sensor of the flow unit. The pressure data module may convert the pressure data into flow data. The flow data may represent the flow of the media through the flow unit. The flow data may include a flow rate of the media.

The orifice module may determine one or more aspects of each orifice member incorporated into the flow unit. For example, a size and range of opening sizes over which an opening of an orifice member may be controlled, a type of valve included in an orifice member, a capability of a sensor included in an orifice member, or other aspects of an orifice member may be determined by the orifice module.

The control output module may generate control data for controlling the orifice members incorporated in the flow unit. The control data may include a control signal for each orifice member controlled by the control output module. Each control signal may be generated based on one or more factors, such as, a property of a media, a selected flow rate, a sensitivity of a valve of an orifice member, an orifice opening size of the orifice member, a valve opening range of an orifice member, or other factors.

The interface module may enable a user to access and/or manipulate the system. The interface module may include a local interface, an interface that enables the user to access and/or manipulate the system via a remote terminal, or another interface. The interface module may enable the user to set or configure one or more parameters of the system, such as, a media, a flow rate, or other parameters. The interface module may enable the user to view one or more results generated by the system. For example, a result may include an actual flow rate, a valve opening size, a pressure, or other results.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a flow chart for protecting a sensor for aggressive media, according to an embodiment of the invention.

FIG. 2 illustrates a flow chart for protecting a valve from aggressive media, according to an embodiment of the invention.

FIG. 3 illustrates a system for monitoring and/or controlling a flow of a media, according to an embodiment of the invention.

FIG. 4 is a functional block diagram of a flow unit, according to an embodiment of the invention.

DETAILED DESCRIPTION OF THE DRAWINGS

One aspect of the invention may relate to a sensor for detecting a differential pressure that may be immune (or substantially immune) to aggressive media. The sensor may generate pressure data in response to a detected pressure. The pressure data may be generated by the sensor in the form of an output signal. For example, the sensor may detect a pressure of a fluid media, or other pressures. In some embodiments, the sensor may include a differential pressure transducer, or other sensors for detecting a differential pressure.

In some embodiments of the invention, the sensor may be made immune to aggressive media according to a method of protecting a sensor against aggressive media. FIG. 1 illustrates a method 110 according to an embodiment of the invention. Method 110 may include an operation 112. At operation 112 an unprotected sensor may be disassembled into one or more sensor components.

One or more of the sensor components may include a semi-conductive surface. The semi-conductive surface may include an edge. According to method 110, one or more of the semi-conductive surfaces of the sensor components may be masked at an operation 114. A novel jigging assembly may be used to mask the appropriate semi-conductive surfaces at operation 114.

Once the appropriate semi-conductive surfaces have been masked, a protective coating may be applied to one or more of the sensor components at an operation 116. In some instances, the protective coating may include an amorphous diamond-like coating, a passivation layer, a polymer coating, a sapphire coating, or other protective coatings. For example, applying the protective coating may include applying the protective coating in a plasma enhanced chemical vapor deposition system, applying the protective coating at low temperatures, or otherwise applying the protective coating. A thickness of the protective coating may be controlled at the angstrom level. The protective coating may provide a pinhole free coating, or other augmentations may be provided.

According to various embodiments of the invention, the coated sensor components may be reassembled to form a protected sensor at an operation 118. The protective coating applied to the coated sensor components of the protected sensor at operation 116 may form a protective barrier against aggressive media and may render the protected sensor immune to aggressive media.

In some embodiments, the protective coating may be applied at operation 116 with a depth such that one or more characteristics of an output signal generated by the protected sensor in response to a detected pressure may be identical (or substantially identical) to an output signal generated by the unprotected sensor (i.e. the protected sensor prior to the application of the protective coating) in response to the same pressure. This may require the protective coating to be applied with a depth such that the coated sensor components may be assembled into the protected sensor with little or no stress due to an increase in size caused by the depth of the protective coating. For example, the protective coating may be provided with a depth of 5-10 Angstroms, or other depths.

Another aspect of the invention may relate to a valve including a variable valve opening that may be immune (or substantially immune) to aggressive media. The valve may vary a size of the variable valve opening over a valve opening range in response to control data. The control data may be in the form of a control signal. In some embodiments, the valve may include a proportional valve, or other valves including a variable valve opening.

In some embodiments of the invention, the valve may be made immune to aggressive media according to a method of protecting a valve against aggressive media. FIG. 2 illustrates a method 210 according to an embodiment of the invention. Method 210 may include disassembling an unprotected valve into one or more valve components at an operation 212.

Once the valve has been disassembled into the valve components, a protective coating may be applied to one or more of the valve components at an operation 214. In some instances, the protective coating may include an amorphous diamond-like coating, a passivation layer, a polymer coating, a sapphire coating, or other protective coatings. For example, applying the protective coating at operation 214 may include applying the protective coating in a plasma enhanced chemical vapor deposition system, applying the protective coating at low temperatures, or otherwise applying the protective coating. A thickness of the protective coating may be controlled at the angstrom level. The protective coating may provide a pinhole free coating, or other augmentations may be provided.

According to various embodiments of the invention, the coated valve components may be reassembled to form a protected valve at an operation 216. The protective coating applied to the coated valve components of the protected valve at operation 214 may form a protective barrier against aggressive media and may render the protected valve immune to aggressive media.

In some embodiments, the protective coating may be applied at operation 214 with a depth such that one or more characteristics of a response of the protected valve to a control signal in configuring the variable valve opening may be identical (or substantially identical) to a response of the unprotected valve (i.e. the protected sensor prior to the application of the protective coating) to the same control signal in configuring the variable valve opening. This may require the protective coating to be applied at operation 214 with a depth such that the coated valve components may be assembled into the protected sensor with little or no stress due to an increase in size caused by the depth of the protective coating. For example, the protective coating may be provided with a depth of 5-10 Angstroms, or other depths.

FIG. 3 illustrates a system 310 for monitoring and/or controlling a flow of a media according to an embodiment of the invention. System 310 may include a flow unit 312 and a processor 314. Flow unit 312 may include a flow body 316, a sensor 318, and one or more removable orifice members 320 (illustrated as an orifice member 320 a, an orifice member 320 b, and an orifice member 320 n). The media may flow through flow unit 312 via flow body 316. A user may select orifice members 320 from a plurality of orifice members and may removably install selected orifice members 320 in flow unit 312 according to a desired feature. For example, orifice members 320 may be selected and installed to provide a flow rate, a range of flow rates, or other features. Orifice members 320 may form laminar flow elements within flow unit 312 to enable a laminar flow of media through system 320. Sensor 318 may measure, acquire, or otherwise sense pressure data related to a pressure of the media within flow unit 312. One or more openings associated with each orifice member 320 may be configured to control a flow rate of the media flowing through flow unit 312. Processor 314 may receive the pressure data provided by sensor 318. Based at least in part on the pressure data, processor 314 may determine flow data related to the flow of the media through flow unit 312. Processor 314 may generate control data related to controlling one or more aspects of flow unit 312 to control the flow rate of the media. For example, an aspect of flow unit 312 may include a size of one or more openings of one or more orifice members, or other aspects of the flow unit.

According to various embodiments of the invention, sensor 318 may measure, acquire, or otherwise sense pressure data related to a pressure of the media within flow unit 312. Sensor 318 may include a differential pressure transducer to measure, acquire, or otherwise sense the pressure data. Sensor 318 may be immune to aggressive media. For example, sensor 318 may include a protected sensor made immune to aggressive according to method 110 of protecting a sensor against aggressive media, or other sensors that may be immune to aggressive media.

FIG. 4 is a functional block diagram of flow unit 312, according to an embodiment of the invention. Flow unit 312 may include flow body 316 and a single orifice member 320, according to an embodiment of the invention. A media entrance 410 may be formed in flow body 316 that may enable the media to enter flow unit 312. A media channel 412 may be formed in flow body 316 that may enable the media to flow through flow unit 312. A media exit 414 may be formed in flow body 316. The media may exit flow unit 312 via media exit 414.

In some embodiments of the invention, a variable valve opening 416 and one or more orifice openings 418 may be formed within orifice member 320. A size of variable valve opening 416 may vary over a valve opening range 420. The sizes of orifice openings 418 and variable valve opening 416 of orifice member 320 may control the flow of the media through orifice member 320. Enabling a user to control variable valve opening 416 may enable the flow of the media through orifice member 320 to be controlled by the user.

Orifice member 320 may include a valve 422. Valve 422 may provide variable valve opening 416. Valve 422 may vary the size of variable valve opening 416 over valve opening range 420 in response to control data. Valve 422 may be immune to aggressive media. For example, valve 422 may include a protected valve made immune to aggressive according to method 210 of protecting a valve against aggressive media, or other valves that may be immune to aggressive media.

The removability of orifice members 320 may enhance control of the flow of the media. For example, a plurality of combinations of various orifice members 320 with various combinations of sizes of orifice openings 418 and ranges of valve opening ranges 420 may be installed into flow unit 312 to guide the media through flow unit 312 over an enhanced range of flow rates. In some embodiments of the invention, orifice members 320 may “snap-fit” with one another, flow body 316, and other system components.

Referring back to FIG. 3, processor 314 may include one or more modules, such as, a pressure data module 322, an orifice module 324, a control output module 326, and an interface module 328. The modules may be implemented in hardware, software, firmware, or a combination of hardware, software, and/or firmware. As would be apparent, various embodiments of the invention may include and/or use some, all, or none of these modules. Further, additional modules may be included in system 310 for providing other functions.

Pressure data module 322 may receive the pressure data generated by orifice members 320. Pressure data module 322 may convert the pressure data into flow data. The flow data may represent the flow of the media through flow unit 312. The flow data may include a flow rate of the media.

Orifice module 324 may determine one or more aspects of each orifice member 320 incorporated into flow unit 312. For example, a size of an opening associated with orifice member 320, a range of opening sizes over which an opening associated with orifice member 320 may be controlled, a type of valve included in orifice member 320, or other aspects of an orifice member may be determined by orifice module 324.

Control output module 326 may generate control data for controlling orifice members 320 incorporated in flow unit 312. The control data may include a control signal for each orifice member 320 controlled by control output module 326. Each control signal may be generated based on one or more factors, such as, a property of a media, a selected flow rate, a sensitivity of a valve associated with orifice member 320, an orifice opening size associated with orifice member 320, a valve opening range associated with orifice member 320, or other factors.

Interface module 328 may enable a user to access and/or manipulate system 310. Interface module 328 may include a local interface, an interface that enables the user to access and/or manipulate system 310 via a remote terminal, or another interface. Interface module 328 may enable the user to set or configure one or more parameters of system 310, such as, a media, a flow rate, or other parameters. Interface module 326 may enable the user to view one or more results generated by system 310. For example, a result may include an actual flow rate, a valve opening size, a pressure, or other results.

It can thus be appreciated that embodiments of the present invention have now been fully and effectively accomplished. The foregoing embodiments have been provided to illustrate the structural and functional principles of the present invention, and are not intended to be limiting. To the contrary, the present invention is intended to encompass all modifications, alterations and substitutions within the spirit and scope of the appended claims. 

1. A sensor that generates an output signal based on one or more aspects of a flow of media, the sensor being immune to aggressive media, the sensor comprising: at least one sensor component that has been individually treated to provide at least one surface on the at least one sensor with a protective coating that protects the at least one sensor against aggressive media.
 2. The sensor of claim 1, wherein the protective coating comprises one or more of a diamond-like coating, a passivation layer, a polymer coating, a sapphire coating, or a diamond coating.
 3. The sensor of claim 1, wherein the protective coating is applied to the sensor in a plasma enhanced chemical vapor deposition system.
 4. The sensor of claim 1, wherein the protective coating is amorphous and pinhole free.
 5. The sensor of claim 1, wherein the protective coating is less than 10 Angstrom thick.
 6. The sensor of claim 5, wherein the protective coating is thicker than 5 Angstrom.
 7. The-sensor of claim 1, wherein the one or more aspects of the flow of media that the output signal is based on comprises a pressure of the media.
 8. A valve that provides an adjustable valve opening for a flow of media to pass through, the valve being immune to aggressive media, the valve comprising: at least one valve component that has been individually treated to provide at least one surface on the at least one valve with a protective coating that protects the at least one valve against aggressive media.
 9. The valve of claim 8, wherein the protective coating comprises one or more of a diamond-like coating, a passivation layer, a polymer coating, a diamond coating, or a sapphire coating.
 10. The valve of claim 8, wherein the protective coating is applied to the valve in a plasma enhanced chemical vapor deposition system.
 11. The valve of claim 8, wherein the protective coating is amorphous and pinhole free.
 12. The valve of claim 8, wherein the protective coating is less than 10 Angstrom thick.
 13. The valve of claim 12, wherein the protective coating is thicker than 5 Angstrom.
 14. A system for controlling a flow of aggressive media, the system comprising: a flow unit that forms a media channel, the media channel enabling a media to flow through the flow unit from a media entrance to a media exit; a sensor disposed within the flow unit that generates an output signal based on one or more aspects of a flow of media within the media channel; at least one orifice member that includes a valve which forms a valve opening, the size of the valve opening being variable based on a control signal received by the valve, the orifice member being removably installed in the flow unit such that the media flowing through the media channel from the media entrance to the media exit passes through the valve opening; and a processor that receives the output signal generated by the sensor and provides at least one control signal to the at least one orifice member to control the size of the valve opening provided by the at least one orifice member based on the output signal received from the sensor.
 15. The system of claim 14, wherein the orifice member is removably installed in the flow unit via a snap-fit.
 16. The system of claim 14, wherein the at least one orifice member is selected for installation in the flow unit based on one or more aspects of the at least one orifice member.
 17. The system of claim 16, wherein the one or more aspects of the orifice member comprises a range of sizes of the valve opening of that at least one orifice member.
 18. The system of claim 14, wherein the at least one orifice member comprises a plurality of orifice members, each of the plurality of orifice members being removably installed in the flow unit.
 19. The system of claim 14, wherein the sensor is substantially immune to aggressive media.
 20. The system of claim 19, wherein the sensor comprises at least one sensor component that is individually provided with a protective coating.
 21. The system of claim 14, wherein the valve is substantially immune to aggressive media.
 22. The system of claim 21, wherein the valve comprises at least one valve component that is individually provided with a protective coating.
 23. The system of claim 14, wherein the one or more aspects of the flow of media within the media channel comprise a differential pressure. 